USPTO Patents Application 10085571

CS-21188

- 20 -

Hybrid Ceramic Electrostatic Clamp
Abstract

The invention is a hybrid chuck for securing
workpieces with an electrostatic charge. The hybrid
chuck includes a dielectric base for supporting the
hybrid chuck. The dielectric base has a top surface
and a conductive layer covers at least a portion of
the top surface of the dielectric base. The
conductive layer is conductive for receiving a current
that creates an electrostatic charge and is non-
metallic for maintaining the electrostatic charge
without significant eddy current losses in the
presence of dynamic electromagnetic fields. The top
working surface covers the conductive layer and is
flat for holding workpieces upon the receiving of the
current to create the electrostatic charge in the
conductive layer.